Production of carbonized micro-patterns by photolithography and pyrolysis
نویسندگان
چکیده
منابع مشابه
Micro-layered-photolithography for Micro- Fabrication and Micro-molding
A novel process based on the principle of layered photolithography has been proposed and tested for making three-dimensional micro-structures. An experimental setup was designed and built for doing experiments on this micro-fabrication process. An ultraviolet (UV) excimer laser at the wavelength of 248 nm was used as the light source and a single piece of photo-mask carrying a series of two dim...
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ژورنال
عنوان ژورنال: Precision Engineering
سال: 2019
ISSN: 0141-6359
DOI: 10.1016/j.precisioneng.2018.08.019